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6 February 2019 Fabrication and optical properties of Er-doped ZnO thin films
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Abstract
In this paper, Er-doped ZnO thin films were deposited on the substrates of slide and Si by sol-gel method. The effects of Er concentration on the structure, morphology and optical properties were studied in detail. The Er/Zn ratio were 1%, 2%,3%,All the samples were characterized by X-ray diffraction(XRD),atomic force microscope(AFM), ultra-violet spectrometer(UVS) and photoluminescence(PL). The AFM images illustrated the morphology of samples have uniform distribution and smooth surface, the grain size became smaller as the Er/Zn molar ratio increased. The PL spectra showed two emission bands located in the UV region and the visible region, both the positions and the intensities are affected by Er concentration. As the doping concentration increased, the transmission side had blue shife and the samples gradually increased ultraviolet light. This result was similar to the transmission spectra. The XRD pattern revealed all the samples had a hexagonal wurtzite structure.
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Jing-hua Xu and Yu Han "Fabrication and optical properties of Er-doped ZnO thin films", Proc. SPIE 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology, 108420X (6 February 2019); https://doi.org/10.1117/12.2507328
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