TFT with ultra-low temperature poly-silicon technology for flexible liquid crystal display

Xuexin Lan; Yanmei Li; Lihua Zheng; Guozhao Chen; Junyi Li; Xuhui Peng

doi:10.1117/12.2512314

8 February 2019 TFT with ultra-low temperature poly-silicon technology for flexible liquid crystal display

Xuexin Lan, Yanmei Li, Lihua Zheng, Guozhao Chen, Junyi Li, Xuhui Peng

Proceedings Volume 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging; 108431R (2019) https://doi.org/10.1117/12.2512314
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

Low temperature poly silicon technology with a temperature of 400℃ was developed and discussed for the application of flexible liquid crystal display (LCD). By optimizing the doping and activation processes, the TFT device with a mobility of 80 cm²/V•s was fabricated successfully. Also we studied the mechanism of doping and activation at 400℃, and found out that the upper limit of implanted dosage and electrical activation rate were 2 × 10¹⁴ ions/cm² and 20%, respectively.

Citation Download Citation

Xuexin Lan, Yanmei Li, Lihua Zheng, Guozhao Chen, Junyi Li, and Xuhui Peng "TFT with ultra-low temperature poly-silicon technology for flexible liquid crystal display", Proc. SPIE 10843, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Sensing and Imaging, 108431R (8 February 2019); https://doi.org/10.1117/12.2512314

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available