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12 December 2018 High accuracy wavefront reconstruction with slope and coordinate compensation
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Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 1084706 (2018)
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China
The conventional wavefront reconstruction of the Shack-Hartmann method is based on the measured slopes by using the least-square fitting method. However, this reconstruction method suffers from the low order Zernike terms in wavefront, especially defocus and astigmatism, due to the discrepancy of coordinate systems between the lenslet array and the original wavefront caused by the propagation of subaperture wavefront. In this paper, a ray tracing method was used to calculate the slope error between an input wavefront and the reconstructed wavefront. Then, an iteration procedure including slope compensation and coordination compensation was constructed and implemented to minimize the wavefront reconstruction error. The numerical simulation was performed for a variety of defocus-dominated input wavefront and high-order-dominated input wavefront, and verified that high accuracy wavefront reconstruction can be achieved by the proposed iterative compensation method.
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Yiyu Li, Wei Huang, Siyun Chen, Jiaojie Chen, Haihua Feng, and Hao Chen "High accuracy wavefront reconstruction with slope and coordinate compensation", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 1084706 (12 December 2018);

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