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12 December 2018 Progress on fabrication and metrology technology study for M3M of TMT
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Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 108470A (2018)
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China
M3M (Mirror 3 Mirror) of TMT (Thirty Meter Telescope) project is a 3.5m×2.5m×0.1m solid flat elliptical mirror. CIOMP is responsible for the fabrication of M3M as part of China’s share in TMT project. CIOMP have beaning working on this project with TMT Corporation since 2012. The requirement of M3M surface including plate scale (18.8 mas), SlopeRMS (0.8μrad) and roughness (Rq 2.2nm). The testing and fabrication technologies required by M3M are challenges for CIOMP especially 6 years ago. To date, Most of Fabrication and testing technology of M3M have been developed and verified at CIOMP. CIOMP has passed reviews including CoDR, PDR, FRR and TRR successfully with board invited by TMT Corporation. Technologies developed for M3M are including on cite large aperture vertical Fizeau sub-aperture interfere test, scanning pentaprism system, and polishing technology with the goal of minimum slopeRMS. A 1/4 equal-stiffness prototype is also fabricated serving as a pathfinder for the fabrication of M3M. All requirement for M3M are achieved on M3MP successfully. This paper give a brief introduction of the work on M3M, M3MP and some of our results. This work is also supported by Major international cooperation projects of the National Natural Science Foundation.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiao Luo, Erhui Qi, Haixiang Hu, and Haifei Hu "Progress on fabrication and metrology technology study for M3M of TMT", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 108470A (12 December 2018);


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