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12 December 2018 Research of controlling the optical face of CaF2 crystal elements on optical grinding and polishing
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Proceedings Volume 10847, Optical Precision Manufacturing, Testing, and Applications; 108470R (2018) https://doi.org/10.1117/12.2505488
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China
Abstract
As an excellent optical element material, CaF2 crystal has a wide-spectrum transmission range and stable physicochemical properties. Due to the soft and brittle nature of CaF2 crystal, also with high coefficient of thermal expansion and low heat conductivity coefficient, it is of great significance to study the stability and characterization of the removal function during the processing of large-diameter CaF2 optical elements with specific geometric requirements. In this paper, a Φ200 mm CaF2 crystal plate was taken as the research object. The stable technique of grinding and polishing calcium fluoride is researched and the pressure is treated as the key factor. The specialized tool is designed to control the pressure. The removal model of grinding and polishing is stablished based on the specialized tool. The pressure distribution of grinding and polishing process is simulated and the optimized pressure distribution is obtained. This makes the whole face error converged efficiently and stably, meanwhile the face to face angle can be controlled precisely. As a conclusion, the PV value of experimental element is less than 0.13λ within the aperture, and the face to face angle is restrained into 5″ after using new tools.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhigang Li, Zhongwen Lu, Heng Zhu, Yunti Pu, Zhengjun Bao, and Ping Ma "Research of controlling the optical face of CaF2 crystal elements on optical grinding and polishing", Proc. SPIE 10847, Optical Precision Manufacturing, Testing, and Applications, 108470R (12 December 2018); https://doi.org/10.1117/12.2505488
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