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12 December 2018 Hypersonic aerodynamics measurement with fiber optic balance based on MEMS Fabry-Perot strain sensor
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Proceedings Volume 10849, Fiber Optic Sensing and Optical Communication; 108490I (2018) https://doi.org/10.1117/12.2504150
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China
Abstract
In general, conventional resistance strain balances are used to obtain aerodynamics forces in hypersonic wind tunnels. Owing to the advantages of fast response, high sensitivity and anti-electromagnetic interference, fiber optic sensors provide a new technical approach to wind tunnel strain balance. In this paper, a three-component fiber optic balance based on MEMS Fabry-Perot strain sensor has been developed. The MEMS strain sensor based on Fabry-Perot interference was fabricated by surface and bulk MEMS techniques. The MEMS FP strain sensor has a high finesse factor by adapting high-reflection films deposited on the surfaces of FP cavity. The three-component fiber optic balance has been calibrated, and evaluated in a hypersonic low density wind tunnel. The results of static calibration and wind tunnel tests have declared a good performance compared to the results of resistance strain balance.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fu Min, Yanguang Yang, Huacheng Qiu, Shaolong Zhong, and Xingcai Pi "Hypersonic aerodynamics measurement with fiber optic balance based on MEMS Fabry-Perot strain sensor", Proc. SPIE 10849, Fiber Optic Sensing and Optical Communication, 108490I (12 December 2018); https://doi.org/10.1117/12.2504150
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