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12 December 2018 Research on manufacturing technology of high-precision aerostatic rotary tables based on LODTM
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Proceedings Volume 10849, Fiber Optic Sensing and Optical Communication; 108491E (2018)
Event: International Symposium on Optoelectronic Technology and Application 2018, 2018, Beijing, China
The core of the high-precision aerostatic rotary table is the aerostatic bearing shafting, including radial bearing and axial bearing. The axial bearing is composed of floating plate and thrust bearings. While, the axial bearing is still processed by manual grinding in China, leading to low machining efficiency, high labor costs and difficult consistency of accuracy.

This paper presents a technology about processing high-precision aerostatic rotary table by SPDT (Single Point Diamond Turning) based on LODTM (Large Optics Diamond Turning Machine) to improve the deficiencies leading by manual grinding. The technology uses single crystal diamond cutting tools for ultra-precision machining, and thus can obtain high-precision optical mirror, which can be adopted in the aerostatic rotary table. An experiment for tin bronze samples has been done to demonstrate the availability of the technique, and a pair of high-precision thrust bearings are obtained. The precision of the thrust bearings, detected through precision optical measurement and precision coordinate measuring technology, is better than the designed requirement. The experiment results show that thrust bearings generated by deterministic ultra-precision machining technique based on LODTM will have advantages in figure accuracy and roughness and so on, which can be helpful to improve the precision and low the cost of high-precision aerostatic rotary table. The high-precision thrust bearings are processed by this way, and the high-precision aerostatic rotary table has been assembled.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Di Li, Jian-Guo Fang, Chang-Yu Xu, Pu Dong, and Song-Bao Luo "Research on manufacturing technology of high-precision aerostatic rotary tables based on LODTM", Proc. SPIE 10849, Fiber Optic Sensing and Optical Communication, 108491E (12 December 2018);

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