This paper presents a technology about processing high-precision aerostatic rotary table by SPDT (Single Point Diamond Turning) based on LODTM (Large Optics Diamond Turning Machine) to improve the deficiencies leading by manual grinding. The technology uses single crystal diamond cutting tools for ultra-precision machining, and thus can obtain high-precision optical mirror, which can be adopted in the aerostatic rotary table. An experiment for tin bronze samples has been done to demonstrate the availability of the technique, and a pair of high-precision thrust bearings are obtained. The precision of the thrust bearings, detected through precision optical measurement and precision coordinate measuring technology, is better than the designed requirement. The experiment results show that thrust bearings generated by deterministic ultra-precision machining technique based on LODTM will have advantages in figure accuracy and roughness and so on, which can be helpful to improve the precision and low the cost of high-precision aerostatic rotary table. The high-precision thrust bearings are processed by this way, and the high-precision aerostatic rotary table has been assembled.
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