19 July 1989 A Computer Aided Engineering Workstation For Registration Control
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Abstract
A computer aided engineering workstation is described which provides for the comprehensive characterization and control of registration performance over an entire process, from stepper set-up through layer-to-layer inspection. The workstation accepts data entered manually and from a number of automated metrology tools. The measurement layout is user defmed and supports the diverse sampling needs of set-up and production. Layouts can be defmed to obtain grid and intrafield placement data simultaneously. Data obtained from all sources can be displayed, manipulated, and analyzed in a user-friendly workstation environment that has been optimized for direct visual and numeric comparison of lithography data. Registration modeling, grid and intrafield, is performed to relate the measured quantities to assignable causes, predict worst case overlay, and to allow for the trending of error components. The workstation can be connected to many steppers and metrology tools at once to provide a registration control center. The application of the workstation to stepper set-up and production line monitoring is demonstrated. Use of the workstation as the registration control center for a production line is discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edward A. Mc Fadden, Edward A. Mc Fadden, Christopher P. Ausschnitt, Christopher P. Ausschnitt, "A Computer Aided Engineering Workstation For Registration Control", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953098; https://doi.org/10.1117/12.953098
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