19 July 1989 A Machine Vision Architecture For Integrated Circuit Inspection
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Abstract
The paper presents a machine vision architecture which can address a wide range of machine vision applications in the manufacture of integrated circuits. A brief review of current applications and the reasons for the success of machine vision in the industry are also presented.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sal D' Agostino, "A Machine Vision Architecture For Integrated Circuit Inspection", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953126; https://doi.org/10.1117/12.953126
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