19 July 1989 Applications of STM Technologies
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Abstract
Measurement of submicron device structures on semiconductors requires increased accuracy from metrology equipment. Scanning Tunneling Microscopy (STM) techniques are being used to meet these needs. Operating in air, these devices generate 3-D images of surface features with a resolution similar to that of a Scanning Electron Microscope (SEM) operating in vacuum.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul E. West, Paul E. West, Sheila Henely, Sheila Henely, } "Applications of STM Technologies", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953113; https://doi.org/10.1117/12.953113
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