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19 July 1989 Automated Calibration Of Optical Photomask Linewidth Standards At The National Institute Of Standards And Technology
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Abstract
An automated system has been developed at the National Institute of Standards and Technology (NIST), formerly the National Bureau of Standards, for calibrating optical photo-mask linewidth standards. This system, controlled by a desktop computer, locates each feature to be measured in the field of view of the microscope, centers and focuses the image, scans the image, and calculates the optical linewidth from the scan data. The results are checked for errors and the process repeated until every feature on the photomask has been calibrated. If statistical tests are passed, a calibration certificate is printed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James Potzick "Automated Calibration Of Optical Photomask Linewidth Standards At The National Institute Of Standards And Technology", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); https://doi.org/10.1117/12.953090
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