19 July 1989 Scanning Electron Microscope Magnification Calibration for Metrology Applications
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Abstract
The magnification calibration method employed by the Nanolab series of instruments (U.S. patent application #117,741) uses a fast Fourier transform (FFT) of the line profile obtained from a calibration standard to accurately determine the system magnification. The standard used is a diffraction grating replica with certification traceable to the National Institute of Standards and Technology (NIST). The calibration routine is fast and simple, allowing the system to be easily recalibrated in less than 60 seconds. After calibration, the Nanolab maintains accurate magnification without the risk of errors associated with methods using compensation factors. This paper reviews factors affecting the accuracy and stability of electron optical measurement system calibration, and different approaches to system calibration. The Nanolab calibration procedure for critical dimension (CD) measurement is then described and the performance evaluated.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Murray Reeves, Murray Reeves, Glen Herriot, Glen Herriot, } "Scanning Electron Microscope Magnification Calibration for Metrology Applications", Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953078; https://doi.org/10.1117/12.953078
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