High-throughput thermal replication of transparent fused silica glass

F. Kotz; A. Striegel; N. Schneider; M. Worgull; B. E. Rapp

doi:10.1117/12.2506155

4 March 2019 High-throughput thermal replication of transparent fused silica glass

F. Kotz, A. Striegel, N. Schneider, M. Worgull, B. E. Rapp

Proceedings Volume 10875, Microfluidics, BioMEMS, and Medical Microsystems XVII; 1087503 (2019) https://doi.org/10.1117/12.2506155
Event: SPIE BiOS, 2019, San Francisco, California, United States

Abstract

Fused silica glass is the material of choice whenever high chemical and thermal resilience combined with high optical transparency is required. These properties make fused silica glass interesting in microfluidics for next generation chemical synthesis reactors as well as microoptics and photonics. However structuring of fused silica glass is difficult and upscaling of microfluidic concepts in glass from laboratory scale prototypes to mass market manufacturing remains a problem. Polymers on the other hand remain the material of choice for low cost, disposable components in mass market manufacturing. We want to close the gap between the superior material properties of fused silica and the ease of highthroughput polymer molding. Here we present high-throughput thermal replication of fused silica glass using thermal nanoimprinting and roll-to-roll replication. Therefore, thermoplastic nanocomposites are structured using classical polymer molding processes at moderate temperatures of 110°C and pressures of 27°MPa. Structuring can be done with submicron resolution and a surface roughness of a few nanometers. Roll-to-roll replication allows structuring these thermoplastic nanocomposites with speeds up to 5 m/min. The structured thermoplastic nanocomposites are then turned into fused silica glass in a final heat treatment.

Conference Presentation

Citation Download Citation

F. Kotz, A. Striegel, N. Schneider, M. Worgull, and B. E. Rapp "High-throughput thermal replication of transparent fused silica glass", Proc. SPIE 10875, Microfluidics, BioMEMS, and Medical Microsystems XVII, 1087503 (4 March 2019); https://doi.org/10.1117/12.2506155

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