25 July 1989 Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks
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Abstract
A method for repairing transparent defects in photomasks has been developed. We discuss the experimental development and integration of the process into a commercial repair system. The defect repair process makes use of a laser to initiate thermal decomposition of a mod-ified commercially available gold metallorganic ink. The ink is locally decomposed with a laser over the defect thereby forming an adherent opaque gold repair pad over the defect. Rectangular repair pads from lum to 25um on a side can be deposited with a single laser exposure of 5 seconds.
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A. J. Serafino, A. J. Serafino, R. J. Coyle, R. J. Coyle, R. Borutta, R. Borutta, A. Kestenbaum, A. Kestenbaum, G. L. Wolk, G. L. Wolk, R. F. Doll, R. F. Doll, } "Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953135; https://doi.org/10.1117/12.953135
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