Effect of Stepper Resolution on the Printability of Submicron 5x Reticle Defects

James N. Wiley

doi:10.1117/12.953134

25 July 1989 Effect of Stepper Resolution on the Printability of Submicron 5x Reticle Defects

James N. Wiley

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953134
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

To determine the effect of wafer stepper resolution on the printability of reticle defects, a test reticle containing edge-related submicron programmed defects was printed using 0.35, 0.43, 0.45 and 0.54 NA g-line 5x steppers. The size of the minimum printable defect was determined by examining the wafer photoresist images using both optical and scanning electron microscopes. Photographs show the effect of submicron defects located on or near geometry edges. Submicron reticle defects affected critical dimensions, image profiles and resist thickness in a 1.5 λ/ NA diameter "sphere of influence" on the wafer. The higher resolution, higher NA steppers printed smaller defects. Defocus was observed to increase the damage caused by printed defects.

Citation Download Citation

James N. Wiley "Effect of Stepper Resolution on the Printability of Submicron 5x Reticle Defects", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953134

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available