25 July 1989 Lithographic Replication Of Compact Disk Structures
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Proceedings Volume 1088, Optical/Laser Microlithography II; (1989); doi: 10.1117/12.953180
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States
Abstract
Conventional UV photolithography has been applied to the replication of glass compact disk structures for low cost fabrication of grooved glass substrates and ruggedized CD-ROM and CD-AUDIO disks. Unconventional pattern generation and replication strategies have been employed to produce high quality compact disk structures in soda-lime glass substrates.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert E. Revay, Philippe Briaud, "Lithographic Replication Of Compact Disk Structures", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953180; https://doi.org/10.1117/12.953180
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KEYWORDS
Compact discs

Glasses

Etching

Optical lithography

Laser optics

Reflectivity

Reactive ion etching

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