25 July 1989 Lithographic Replication Of Compact Disk Structures
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Abstract
Conventional UV photolithography has been applied to the replication of glass compact disk structures for low cost fabrication of grooved glass substrates and ruggedized CD-ROM and CD-AUDIO disks. Unconventional pattern generation and replication strategies have been employed to produce high quality compact disk structures in soda-lime glass substrates.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert E. Revay, Philippe Briaud, "Lithographic Replication Of Compact Disk Structures", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953180; https://doi.org/10.1117/12.953180
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