25 July 1989 Use Of Mask Making Technology In Producing High Quality, Low Cost Passive Optical Devices
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Abstract
A concept of fabricating high quality optical passive components directly into mask blanks is introduced to simplify fabrication processes. The concept is demonstrated by fabricating ion-exchanged wave-guides, diffractive binary amplitude and phase coded holographic optical elements, Dammann gratings and diffraction-free beam elements.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arto Salin, Arto Salin, } "Use Of Mask Making Technology In Producing High Quality, Low Cost Passive Optical Devices", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953181; https://doi.org/10.1117/12.953181
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