1 August 1989 High Efficiency X-ray Zoneplates by Layering and Index Grading
Author Affiliations +
Abstract
X-ray zoneplates are usually made by lithographic means. This limits the resolution to features no smaller than that of the smallest zone, i.e. resolution no better than the e-beam used to generate the zoneplate. Energy is diffracted into several modes, which not only lowers efficiency, but different modes (real, virtual, zero order, plus higher order,) interfere with each other and make precise lithography impossible.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Donald L. White, Donald L. White, } "High Efficiency X-ray Zoneplates by Layering and Index Grading", Proc. SPIE 1089, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies VIII, (1 August 1989); doi: 10.1117/12.968535; https://doi.org/10.1117/12.968535
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT


Back to Top