Characterization of the thermo-optic coefficient of silicon oxynitride using whispering gallery mode optical microcavities

Andre Kovach; Dongyu Chen; Soheil Soltani; Sumiko Poust; Vincent Gambin; Andrea M. Armani

doi:10.1117/12.2507561

4 March 2019 Characterization of the thermo-optic coefficient of silicon oxynitride using whispering gallery mode optical microcavities

Andre Kovach, Dongyu Chen, Soheil Soltani, Sumiko Poust, Vincent Gambin, Andrea M. Armani

Author Affiliations +

Proceedings Volume 10904, Laser Resonators, Microresonators, and Beam Control XXI; 109041A (2019) https://doi.org/10.1117/12.2507561
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

Recent advances in optical materials have enabled the development of a wide range of integrated photonic devices from high speed modulators to frequency combs. With low optical loss over a wide wavelength range and environmental stability in ambient environments for several weeks, silicon oxynitride (SiO_xN_y) shows potential in many of these applications. However, unlike many classic optical materials, the thermo-optic response (dn/dT) in both the visible and near-IR is poorly characterized, limiting researcher’s ability to accurately model device performance. Here, we leverage the intrinsic thermal response of resonant cavities to measure the dn/dT of SiO_xN_y with a 12.7:1 and 4:1 oxygen to nitrogen ratio based on EDX measurements. The thermo-optic coefficient is measured in the visible and near-IR and compared with SiO₂. The refractive indices of the silicon oxynitride films were also measured using spectroscopic ellipsometry. Based on an analysis of the O:N ratio and a comparison with both SiO₂ and Si₃N₄, an expression for the dependence of the dn/dT on the stoichiometric ratio is developed.

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Citation Download Citation

Andre Kovach, Dongyu Chen, Soheil Soltani, Sumiko Poust, Vincent Gambin, and Andrea M. Armani "Characterization of the thermo-optic coefficient of silicon oxynitride using whispering gallery mode optical microcavities", Proc. SPIE 10904, Laser Resonators, Microresonators, and Beam Control XXI, 109041A (4 March 2019); https://doi.org/10.1117/12.2507561

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