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13 March 2019 Flexible femtosecond processing with programmable light modulators (Conference Presentation)
Eric Audouard, Eric Mottay, Martin Delaigue, Axel Chambinaud, Konstantin Mishchik, Clemens Hönninger, Benjamin Dusser, Yoan Di Maio, Sébastien Landon
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Proceedings Volume 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV; 109050B (2019) https://doi.org/10.1117/12.2510426
Event: SPIE LASE, 2019, San Francisco, California, United States
Abstract
Translating the high available power for current industrial lasers in the 100 to 500 W range into high throughput micro-processing is of high importance for future industrial applications. High repetition rates and/or high energies can lead to detrimental thermal effects on the sample and degrade the process quality even using ultrafast lasers. New processing strategies are therefore required to take full advantage of the laser available power. Programmable spatial light modulators (SLM) can bring flexibility while maintaining a high spatial resolution compatible with complex optical functions like multi spots or user defined beam profiles. They enable specific laser characteristics, that can change during the process. The recent technological progress in LCOS based systems, enables high optical transmission greater than 95 %, but also high average power handling up to at least 100 W of laser power. However, the dependence of SLM shaping performance on laser bandwidth places specific requirement when using ultrafast lasers. We will present phase map optimization strategies dedicated to specific industrial applications.
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Eric Audouard, Eric Mottay, Martin Delaigue, Axel Chambinaud, Konstantin Mishchik, Clemens Hönninger, Benjamin Dusser, Yoan Di Maio, and Sébastien Landon "Flexible femtosecond processing with programmable light modulators (Conference Presentation)", Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050B (13 March 2019); https://doi.org/10.1117/12.2510426
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KEYWORDS
Femtosecond phenomena
Modulators
Spatial light modulators
Ultrafast lasers
Laser applications
Laser processing
Liquid crystal on silicon
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