Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS

Shuichiro Hayashi; Yasutaka Nakajima; Mitsuhiro Terakawa

doi:10.1117/12.2507088

4 March 2019 Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS

Shuichiro Hayashi, Yasutaka Nakajima, Mitsuhiro Terakawa

Author Affiliations +

Proceedings Volume 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV; 1090519 (2019) https://doi.org/10.1117/12.2507088
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

By femtosecond-laser-based modification of polydimethylsiloxane (PDMS), we fabricated an electrically conductive structure composed of β-silicon carbide (β-SiC) on a PDMS thin film for strain sensing. With an increase in applied strain, i.e. smaller bend radii of the conductive structures, the conductivity of the structure decreased significantly. The result indicates that the resistance of the conductive structure has high sensitivity to strain, leading to potential applications such as real-time monitoring of human motion.

Citation Download Citation

Shuichiro Hayashi, Yasutaka Nakajima, and Mitsuhiro Terakawa "Strain sensing using electrically conductive structures composed of β-SiC fabricated by femtosecond laser direct modification of PDMS", Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 1090519 (4 March 2019); https://doi.org/10.1117/12.2507088

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