Femtosecond laser induced damage threshold (LIDT) of 3D nanolithography made micro- and nano-optical elements

Agnė Butkutė; Linas Jonušauskas; Darius Gailevičius; Vygantas Mizeikis; Mangirdas Malinauskas

doi:10.1117/12.2509992

4 March 2019 Femtosecond laser induced damage threshold (LIDT) of 3D nanolithography made micro- and nano-optical elements

Agnė Butkutė, Linas Jonušauskas, Darius Gailevičius, Vygantas Mizeikis, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume 10909, Laser 3D Manufacturing VI; 109090T (2019) https://doi.org/10.1117/12.2509992
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

3D laser lithography is a powerful technology to manufacture free-form micro- and nano-optical components. However, practical applications of these components are limited due to lack of knowledge of their optical resilience to intense femtosecond laser radiation, especially in the case of complex-shaped 3D structures. In this report, 3D woodpile structures were fabricated using 3D laser lithography in order to evaluate their laser-induced damage threshold (LIDT). For that S-on-1 testing method was performed on fabricated polymeric nanolatices showing their resilience to femtosecond radiation in the fluence range from tens to hundreds mJ/cm². Furthermore, numerical modeling and experimental investigation were employed to deduce if the chosen geometry provided any photonic properties that could yield a change in the LIDT.

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Agnė Butkutė, Linas Jonušauskas, Darius Gailevičius, Vygantas Mizeikis, and Mangirdas Malinauskas "Femtosecond laser induced damage threshold (LIDT) of 3D nanolithography made micro- and nano-optical elements", Proc. SPIE 10909, Laser 3D Manufacturing VI, 109090T (4 March 2019); https://doi.org/10.1117/12.2509992

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