Precise and large-dynamic-range surface profilometry using time-of-flight detection of femtosecond optical pulses

Yongjin Na; Xing Lu; Chan-Gi Jeon; Kebin Shi; Jungwon Kim

doi:10.1117/12.2508242

4 March 2019 Precise and large-dynamic-range surface profilometry using time-of-flight detection of femtosecond optical pulses

Yongjin Na, Xing Lu, Chan-Gi Jeon, Kebin Shi, Jungwon Kim

Author Affiliations +

Proceedings Volume 10909, Laser 3D Manufacturing VI; 1090916 (2019) https://doi.org/10.1117/12.2508242
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

We demonstrate a new precise TOF detection-based surface profilometry technique by utilizing FLOM-PD’s sub-fs resolution electro-optic sampling between an optical pulse train and a microwave signal. The imaging can be realized by scanning the sample’s position laterally, as a scanning LIDAR system does. Using this technique, three samples of different step heights are successfully imaged. Our method achieves high precision of 4.2 nm repeatability and large maximum detectable range of 9.1 mm NAR, and accordingly, dynamic range is larger than 120 dB.

Citation Download Citation

Yongjin Na, Xing Lu, Chan-Gi Jeon, Kebin Shi, and Jungwon Kim "Precise and large-dynamic-range surface profilometry using time-of-flight detection of femtosecond optical pulses", Proc. SPIE 10909, Laser 3D Manufacturing VI, 1090916 (4 March 2019); https://doi.org/10.1117/12.2508242

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