Translator Disclaimer
Paper
4 March 2019 CMOS compatible silicon slot ring resonator sensor
Author Affiliations +
Abstract
We propose a fully CMOS compatible optical sensor based on the ring resonator mechanism. The waveguide structure of the sensor utilizes the silicon on insulator slot waveguide configuration. The analyte fills the slot and the cladding of the ring resonator. Since the optical power is enhanced and confined within the slot, then the overlap between the analyte and the optical power is maximized. The sensitivity of the sensor was measured to be 350 nm/RIU at the optical wavelength of 1.55 μm.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. M. Sherif, L. Shahada, and M. Swillam "CMOS compatible silicon slot ring resonator sensor", Proc. SPIE 10921, Integrated Optics: Devices, Materials, and Technologies XXIII, 109212A (4 March 2019); https://doi.org/10.1117/12.2510513
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
Back to Top