Silicon photonic integrated circuit for on-chip spectroscopic gas sensing

Chi Xiong; Yves Martin; Eric J. Zhang; Jason S. Orcutt; Martin Glodde; Laurent Schares; Tymon Barwicz; Chu C. Teng; Gerard Wysocki; William M. J. Green

doi:10.1117/12.2511793

4 March 2019 Silicon photonic integrated circuit for on-chip spectroscopic gas sensing

Chi Xiong, Yves Martin, Eric J. Zhang, Jason S. Orcutt, Martin Glodde, Laurent Schares, Tymon Barwicz, Chu C. Teng, Gerard Wysocki, William M. J. Green

Author Affiliations +

Proceedings Volume 10923, Silicon Photonics XIV; 109230G (2019) https://doi.org/10.1117/12.2511793
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

We present a chip-scale spectroscopic methane sensor, incorporating a tunable laser, sensor waveguides, and methane reference cell, assembled as a compact silicon photonic integrated circuit. The sensor incorporates an InP-based semiconductor optical amplifier/photodetector array, flip-chip soldered onto a silicon photonic substrate using highprecision waveguide-to-waveguide interfaces. The InP chip provides gain for a hybrid external cavity laser operating at 1650 nm. The sensor features a 20-cm-long TM-mode evanescent-field waveguide as the sensing element and is compatible with high-volume wafer-scale silicon photonics manufacturing and assembly processes. This sensor can be an enabling platform for economical methane and more general distributed environmental trace-gas monitoring.

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Chi Xiong, Yves Martin, Eric J. Zhang, Jason S. Orcutt, Martin Glodde, Laurent Schares, Tymon Barwicz, Chu C. Teng, Gerard Wysocki, and William M. J. Green "Silicon photonic integrated circuit for on-chip spectroscopic gas sensing", Proc. SPIE 10923, Silicon Photonics XIV, 109230G (4 March 2019); https://doi.org/10.1117/12.2511793

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