Multilayer hyperbolic metamaterial based on alternating TiO2/Cu layers

James Dilts; Azad Siahmakoun; Hossein Alisafaee

doi:10.1117/12.2507999

4 March 2019 Multilayer hyperbolic metamaterial based on alternating TiO₂/Cu layers

James Dilts, Azad Siahmakoun, Hossein Alisafaee

Proceedings Volume 10927, Photonic and Phononic Properties of Engineered Nanostructures IX; 1092711 (2019) https://doi.org/10.1117/12.2507999
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

A multilayer hyperbolic metamaterial (HMM), fabricated from alternating thin films of metal and dielectric, displays a hyperbolic, anisotropic dispersion relation due to the coupling of excited surface plasmons. The design, fabrication, and characterization of an HMM based on TiO₂ / Cu alternating layers with a metal-to-dielectric fill factor of 67% is presented. The layers were deposited onto glass and silicon substrates using physical vapor deposition (PVD) with an electron beam evaporator and then characterized using ellipsometry. According to the effective medium theory, this design shows an epsilon-near-zero (ENZ) line near the Helium-Neon wavelength of 633 nm. Our experimental measurements are in good agreement with the theoretical predictions.

Conference Presentation

Citation Download Citation

James Dilts, Azad Siahmakoun, and Hossein Alisafaee "Multilayer hyperbolic metamaterial based on alternating TiO₂/Cu layers", Proc. SPIE 10927, Photonic and Phononic Properties of Engineered Nanostructures IX, 1092711 (4 March 2019); https://doi.org/10.1117/12.2507999

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