A 3C-SiC-on-oxide (SiCOI) platform enabling high-Q resonators over an octave frequency range from visible to near-infrared (Conference Presentation)

Tianren Fan; Hesam Moradinejad; Xi Wu; Ali A. Eftekhar; Ali Adibi

doi:10.1117/12.2517638

Translator Disclaimer

8 March 2019 A 3C-SiC-on-oxide (SiCOI) platform enabling high-Q resonators over an octave frequency range from visible to near-infrared (Conference Presentation)

Tianren Fan, Hesam Moradinejad, Xi Wu, Ali A. Eftekhar, Ali Adibi

Author Affiliations +

Proceedings Volume 10927, Photonic and Phononic Properties of Engineered Nanostructures IX; 109270S (2019) https://doi.org/10.1117/12.2517638
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

3C-SiC is a large bandgap material with a wide range of applications both in electronics and photonics. Here we demonstrate a low-loss 3C-SiC-on-Oxide (SiCOI) platform over an octave frequency range from visible to near-infrared. A 3C-SiC film is transferred onto an oxide-on-silicon substrate through wafer bonding to form a reliable SiCOI platform suitable for device integration, and the defect-rich transition layer in SiC is removed by chemical mechanical polishing (CMP). With low density of defects and a small root-mean-square (RMS) surface roughness (Rq) of about 1.4 Å in our SiC thin film, we are able to demonstrate record-high intrinsic quality factors of ~250,000 at 1550 nm wavelength and ~85,000 at 770 nm wavelength. Our low-loss SiCOI platform is promising for wideband nonlinear optical applications including second harmonic generation (SHG), four wave mixing (FWM), and Kerr frequency comb.

Conference Presentation

Citation Download Citation

Tianren Fan, Hesam Moradinejad, Xi Wu, Ali A. Eftekhar, and Ali Adibi "A 3C-SiC-on-oxide (SiCOI) platform enabling high-Q resonators over an octave frequency range from visible to near-infrared (Conference Presentation)", Proc. SPIE 10927, Photonic and Phononic Properties of Engineered Nanostructures IX, 109270S (8 March 2019); https://doi.org/10.1117/12.2517638

ACCESS THE FULL ARTICLE