Engineered nanostructures characterization by spectral interferometric microscopy

Michail Symeonidis; Radius N. S. Suryadharma; Rossella Grillo; Toralf Scharf; Carsten Rockstuhl; Thomas Bürgi

doi:10.1117/12.2507422

4 March 2019 Engineered nanostructures characterization by spectral interferometric microscopy

Michail Symeonidis, Radius N. S. Suryadharma, Rossella Grillo, Toralf Scharf, Carsten Rockstuhl, Thomas Bürgi

Proceedings Volume 10927, Photonic and Phononic Properties of Engineered Nanostructures IX; 1092712 (2019) https://doi.org/10.1117/12.2507422
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

We characterize engineered nanostructures with sizes smaller than half a wavelength using spectrally resolved interferometry. We analyze the response of the meta-atom of interest, which has a raspberry-like geometry. To identify the origin of the response, the study of individual building blocks, namely individual gold and silica nano-spheres, are first examined in this paper. Due to the fact that the size of the object is smaller than the resolution limit, phase information plays an important role in our analysis.

Conference Presentation

Citation Download Citation

Michail Symeonidis, Radius N. S. Suryadharma, Rossella Grillo, Toralf Scharf, Carsten Rockstuhl, and Thomas Bürgi "Engineered nanostructures characterization by spectral interferometric microscopy", Proc. SPIE 10927, Photonic and Phononic Properties of Engineered Nanostructures IX, 1092712 (4 March 2019); https://doi.org/10.1117/12.2507422

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