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4 March 2019 Large-area fabrication of metasurface on microspheres based on colloidal assembly and femtosecond ablation
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Proceedings Volume 10928, High Contrast Metastructures VIII; 109280T (2019) https://doi.org/10.1117/12.2508625
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
A nanofabrication method of metasurfaces based on colloidal assembly and femtosecond ablation is proposed and demonstrated. The metasurfaces on microspheres own the advantages of large area, low cost, long-range periodicity, high light-scattering efficiency and compatibility with liquid crystal display (LCD) manufacturing. Here, the diffractionunlimited nano-ablation is realized on the gold layer hemispherically coated on the assembled silica microspheres. The radius of ablated spot and half-pitch of ablated slit achieved in the experiment are ~130 nm and ~30 nm, respectively. Through changing the incidence angle of the femtosecond laser beam, some complicated ablation nanopatterns consisting of spots and slits would be realized.
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Tuo Qu, Fang Liu, Yuechai Lin, and Yidong Huang "Large-area fabrication of metasurface on microspheres based on colloidal assembly and femtosecond ablation", Proc. SPIE 10928, High Contrast Metastructures VIII, 109280T (4 March 2019); https://doi.org/10.1117/12.2508625
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