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4 March 2019 Refinements in membrane projection lithography: a route to fabrication of 3D metamaterials
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Abstract
Membrane projection lithography (MPL) is a fabrication approach in which a novel process flow and mature silicon processing equipment combine to create three-dimensional metamaterials with size scales operational at optical frequencies. In its most common realization, MPL leverages microelectromechanical (MEMS) processing techniques to create cubic unit cells with silicon walls, planarized by chemical mechanical polishing (CMP), a technique that is not omnipresent in fabrication facilities. Here we show several variants of MPL, two of which do not require CMP to make the MPL process compatible with low-tech fabrication environments and open the MPL process to a wider audience.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Katherine M. Musick and D. Bruce Burckel "Refinements in membrane projection lithography: a route to fabrication of 3D metamaterials", Proc. SPIE 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII, 1093005 (4 March 2019); https://doi.org/10.1117/12.2513632
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