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The deflection of the scanning grating device used in this kind of MEMS based spectrometers becomes a limiting factor for extending the spectral range. By using a plain scanner mirror which illuminates a fixed grating and gathers the reflected radiance simultaneously the spectral range can be doubled applying the same MEMS deflection. Furthermore, the wider spectral range can be supported by using two or more detectors with different spectral characteristics placed behind two or more separated exit slits. These slits could be integrated into the same MEMS chip like the scanner mirror device. Several optical designs for miniaturized setups have been compared to find an optimized option which requires affordable optical components only. Here especially the two mirrors in the setup are relevant for a suitable spectrometer performance with acceptable effort. Finally a folded Czerny-Turner type setup has been chosen which can be integrated by the “place and bend” assembly. |
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