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4 March 2019 MEMS-in-the-lens 3D beam scanner for in vivo microscopy
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Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 1093110 (2019)
Event: SPIE OPTO, 2019, San Francisco, California, United States
The “MEMS-in-the-lens” active lens for a laser scanning microscope comprises a high numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens. The scanner utilizes a silicon gimbal with SU-8 polymer flexures and deformable membrane mirror. The mirror aperture is 4 mm in diameter, and is capable of 9 μm deflection for focus control, with four annular electrodes to allow tuning of primary and secondary spherical aberration. The gimbal supports tip/tilt actuation up to ±3° for lateral beam scanning. We show confocal imaging using a benchtop mockup of the active lens, illustrating the potential for this approach to support 3D microscopy for optical biopsy applications.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David L. Dickensheets, Tianbo Liu, and Milind Rajadhyaksha "MEMS-in-the-lens 3D beam scanner for in vivo microscopy", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093110 (4 March 2019);


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