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1 March 2019 Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks
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Abstract
This paper presents an overview of technologies of MEMS Cs microcells for CPT-based atomic clocks, obtained in FEMTO-ST Institute over the last decade. We discuss the challenges in microfabrication of miniature cells: the different configurations of cells, two methods for filling alkali vapor cells with Cs from a dispenser pill and from the dispensing paste, and a study on the permeability of our microcells to the buffer gas limiting the sealing performances. Finally, we report on the aging tests and resulting short-term and long-term clock stability measurements.
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© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Gorecki, V. Maurice, R. Boudot, S. Bargiel, N. Passilly, R. Chutani, R. Vicarini, and S. Galliou "Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks", Proc. SPIE 10934, Optical, Opto-Atomic, and Entanglement-Enhanced Precision Metrology, 109342F (1 March 2019); https://doi.org/10.1117/12.2506225
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