High-power VCSEL arrays with customized beam divergence for 3D-sensing applications

Serdal Okur; Maik Scheller; Jean-Francois Seurin; Alexander Miglo; Guoyang Xu; Dingkai Guo; Robert Van Leeuwen; Baiming Guo; Hasan Othman; Laury Watkins; Chuni Ghosh

doi:10.1117/12.2508485

1 March 2019 High-power VCSEL arrays with customized beam divergence for 3D-sensing applications

Serdal Okur, Maik Scheller, Jean-Francois Seurin, Alexander Miglo, Guoyang Xu, Dingkai Guo, Robert Van Leeuwen, Baiming Guo, Hasan Othman, Laury Watkins, Chuni Ghosh

Author Affiliations +

Proceedings Volume 10938, Vertical-Cavity Surface-Emitting Lasers XXIII; 109380F (2019) https://doi.org/10.1117/12.2508485
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

The demand for high-power vertical-cavity surface-emitting laser (VCSEL) arrays is increasing continuously due to the growing market for 3D sensing solutions. In these applications (e.g. face recognition or drive-assistance systems), the distances of the objects of interest vary by orders of magnitude. For this reason, a flexible tailoring of the beam divergence is desired. In this work, we discuss methods to tune the emitted beam profile by only optimizing the epitaxial structure of a VCSEL. We show results of VCSEL arrays with beam divergences ranging between ~10° and 45°. This technique is also power scalable and multi-watt VCSEL arrays can be realized.

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Serdal Okur, Maik Scheller, Jean-Francois Seurin, Alexander Miglo, Guoyang Xu, Dingkai Guo, Robert Van Leeuwen, Baiming Guo, Hasan Othman, Laury Watkins, and Chuni Ghosh "High-power VCSEL arrays with customized beam divergence for 3D-sensing applications", Proc. SPIE 10938, Vertical-Cavity Surface-Emitting Lasers XXIII, 109380F (1 March 2019); https://doi.org/10.1117/12.2508485

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