Paper
1 March 2019 Three-dimensional nanorod structure through nano-mold process
Je Won Kim
Author Affiliations +
Abstract
This study is to produce three-dimensional structure by applying nano-mold process. The three-dimensional structure can be more suitably provided through a nano process using a patterning and etching process. The nano-mold process enables multiple wavelength light emitting diode. The nanorod structure through nano-mold technology is suggesting the new characteristics of nano structure by the way of realizing the light emitting diode of three-dimensional structure. The light emitting area will also be enlarged through changing three-dimensional from two-dimensional structure.
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Je Won Kim "Three-dimensional nanorod structure through nano-mold process", Proc. SPIE 10940, Light-Emitting Devices, Materials, and Applications, 109400D (1 March 2019); https://doi.org/10.1117/12.2507113
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KEYWORDS
Nanorods

Etching

Indium

Oxides

Light emitting diodes

Quantum wells

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