Holographic camera for non-contact measurement of nanoscale surface heights

Hui Wang; Parsa Omidi; Jeffrey J. L. Carson; Mamadou Diop

doi:10.1117/12.2506629

1 March 2019 Holographic camera for non-contact measurement of nanoscale surface heights

Hui Wang, Parsa Omidi, Jeffrey J. L. Carson, Mamadou Diop

Proceedings Volume 10944, Practical Holography XXXIII: Displays, Materials, and Applications; 109440X (2019) https://doi.org/10.1117/12.2506629
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

We report on the development of a holographic camera capable of measuring nanometer-scale surface features. The system is based on a modified off-axis Mach-Zehnder interferometer and was optimized to provide high-quality interference patterns. Fast imaging was implemented with a time-gated intensified CCD camera directly facing the surface of the object. By increasing the intensifier gain, holographic images with good contrast could be captured within 1 ns. We tested the ability of the camera to measure nanometer-scale height differences using a patterned USAF target. The depth resolution of the camera was estimated to be better than 10 nm. We also found that both the object-CCD distance and the angle between the object and reference beams had significant impact on the quality of the reconstructed surface profiles. Potential applications of the camera include measurement of tissue surface displacements for non-contact photoacoustic imaging.

Citation Download Citation

Hui Wang, Parsa Omidi, Jeffrey J. L. Carson, and Mamadou Diop "Holographic camera for non-contact measurement of nanoscale surface heights", Proc. SPIE 10944, Practical Holography XXXIII: Displays, Materials, and Applications, 109440X (1 March 2019); https://doi.org/10.1117/12.2506629

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available