3D mask effects in high NA EUV imaging

Andreas Erdmann; Peter Evanschitzky; Gerardo Bottiglieri; Eelco van Setten; Timon Fliervoet

doi:10.1117/12.2515678

26 March 2019 3D mask effects in high NA EUV imaging

Andreas Erdmann, Peter Evanschitzky, Gerardo Bottiglieri, Eelco van Setten, Timon Fliervoet

Proceedings Volume 10957, Extreme Ultraviolet (EUV) Lithography X; 109570Z (2019) https://doi.org/10.1117/12.2515678
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Understanding, characterization and management of 3D mask effects, including non-telecentricity, contrast fading and best focus shifts, become increasingly important for the performance optimization of future extreme ultraviolet (EUV) projection systems and mask designs. Novel imaging configuration and central obscuration in high NA EUV projection systems introduce additional imaging effects. A simplified coherent imaging model, rigorous mask diffraction simulations, images for individual source areas and a hybrid mask model are employed to analyze the root causes of observed imaging artifacts. Based on this, several image enhancement strategies including modifications of mask and source are devised and investigated for lines/spaces.

Conference Presentation

Citation Download Citation

Andreas Erdmann, Peter Evanschitzky, Gerardo Bottiglieri, Eelco van Setten, and Timon Fliervoet "3D mask effects in high NA EUV imaging", Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, 109570Z (26 March 2019); https://doi.org/10.1117/12.2515678

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