Electrically measurable test structures to capture and classify EUV stochastics

Hemant Vats; Ryan Ryoung Han Kim; Yasser Sherazi; Youssef Drissi; Kurt Ronse

doi:10.1117/12.2515418

4 June 2019 Electrically measurable test structures to capture and classify EUV stochastics

Hemant Vats, Ryan Ryoung Han Kim, Yasser Sherazi, Youssef Drissi, Kurt Ronse

Proceedings Volume 10957, Extreme Ultraviolet (EUV) Lithography X; 109571M (2019) https://doi.org/10.1117/12.2515418
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Advanced technology nodes are demanding aggressive printability using EUV. EUV printing process inherently brings in stochastic defects. To measure and experience various types of Stochastics in EUV printing, high volume measurements are deemed necessary. Furthermore the classification of the defects in terms of stochastic and systematic is also required. The permutation and combinations of shapes, sizes, and proximity driven stochastics errors are high in numbers, leading to significant increase in the number of test structures needed. Without electrically measurable solutions, the defect test measurement exercise becomes impractical to perform visually. This paper will describe few examples of developing and handling the test structures capable to capture the defects and defect location and further to classify the defects in terms of stochastic or systematic defects.

Citation Download Citation

Hemant Vats, Ryan Ryoung Han Kim, Yasser Sherazi, Youssef Drissi, and Kurt Ronse "Electrically measurable test structures to capture and classify EUV stochastics", Proc. SPIE 10957, Extreme Ultraviolet (EUV) Lithography X, 109571M (4 June 2019); https://doi.org/10.1117/12.2515418

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available