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26 March 2019 Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)
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Full abstract not available at present - I will submit it this week or early next week.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, Robert Karl Jr., Peter Johnsen, Nicholas W. Jenkins, Charles S Bevis, Bin Wang, Jeremy Thurston, Xiaoshi Zhang, Seth L. Cousin, Daniel E. Adams, Michael Gerrity, Henry C. Kapteyn, and Margaret Murnane. "Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109590G (26 March 2019); https://doi.org/10.1117/12.2516827
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