Study on a feasibility of dark-field illumination for the near-field microscope

Hangyeong Oh; Woojun Han; Yungi Lee; Jaisoon Kim

doi:10.1117/12.2514442

26 March 2019 Study on a feasibility of dark-field illumination for the near-field microscope

Hangyeong Oh, Woojun Han, Yungi Lee, Jaisoon Kim

Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 109592I (2019) https://doi.org/10.1117/12.2514442
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

To realize higher resolution in optical inspection systems is typically using shorter wavelengths including UV light and a higher NA of the objective lens. Extreme performances of illumination and imaging systems in well-matched situations are inevitable with further effort put on the development of an effective optical system for inspecting microscopic defects on patterned wafers.

For this study, we focus on the dark-field illumination system for index-matched near-field microscope using an aplanatic solid immersion lens (A-SIL). We present dark-field illumination that has illumination channels on the side of the A-SIL to overcome the issue of deficient space. The table-top experiments are conducted to show a feasibility of a dark-field imaging method for the near-field condition before verifying the performance of the optical system.

Citation Download Citation

Hangyeong Oh, Woojun Han, Yungi Lee, and Jaisoon Kim "Study on a feasibility of dark-field illumination for the near-field microscope", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109592I (26 March 2019); https://doi.org/10.1117/12.2514442

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available