PROCEEDINGS VOLUME 10962
SPIE ADVANCED LITHOGRAPHY | 24-28 FEBRUARY 2019
Design-Process-Technology Co-optimization for Manufacturability XIII
Editor(s): Jason P. Cain
Editor Affiliations +
Proceedings Volume 10962 is from: Logo
SPIE ADVANCED LITHOGRAPHY
24-28 February 2019
San Jose, California, United States
Front Matter: Volume 10962
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096201 (2019) https://doi.org/10.1117/12.2533864
Design-Technology Co-optimization
S. M. Yasser Sherazi, Miroslav Cupak, P. Weckx, O. Zografos, D. Jang, P. Debacker, D. Verkest, A. Mocuta, R. H. Kim, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096202 (2019) https://doi.org/10.1117/12.2514569
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096203 (2019) https://doi.org/10.1117/12.2515162
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096204 (2019) https://doi.org/10.1117/12.2514896
Bharani Chava, Khaja Ahmad Shaik, Anne Jourdain, Sofiane Guissi, Pieter Weckx, Julien Ryckaert, Geert Van Der Plaas, Alessio Spessot, Eric Beyne, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096205 (2019) https://doi.org/10.1117/12.2514942
S. M. Y. Sherazi, J. K. Chae, P. Debacker, L. Matti, D. Verkest, A. Mocuta, R. H. Kim, A. Spessot, A. Dounde, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096206 (2019) https://doi.org/10.1117/12.2514571
Layout Analytics
Yacoub Kureh, Vito Dai, Luigi Capodieci
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096207 (2019) https://doi.org/10.1117/12.2516583
Yuansheng Ma, Feng Wang, Qian Xie, Le Hong, Joerg Mellmann, Yuyang Sun, Shao Wen Gao, Sonal Singh, Panneerselvam Venkatachalam, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096208 (2019) https://doi.org/10.1117/12.2513232
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096209 https://doi.org/10.1117/12.2516571
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620A (2019) https://doi.org/10.1117/12.2517194
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620B (2019) https://doi.org/10.1117/12.2516101
Machine Learning
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620C https://doi.org/10.1117/12.2515268
Yonghwi Kwon, Youngsoo Song, Youngsoo Shin
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620D (2019) https://doi.org/10.1117/12.2515159
Marco Guajardo, Yulu Chen, Peter Brooker, C.-E. Wu, Kevin Hooker, Folarin Latinwo, Kevin Lucas
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620E (2019) https://doi.org/10.1117/12.2516134
Kostas Adam, Shashidhara Ganjugunte, Clement Moyroud, Kostya Shchehlik, Michael Lam, Andrew Burbine, Germain Fenger, Yuri Granik
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620F (2019) https://doi.org/10.1117/12.2519848
Process Modeling and Layout Optimization
Lynn Wang, Gail Katzman, Yongfu Li, Vikas Mehrotra, Janam Bakshi, Ahmed Abdulghany, Michael Simcoe, Rais Huda, Zhao Chuan Lee, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620G (2019) https://doi.org/10.1117/12.2514769
Sébastien Bérard-Bergery, Jérôme Hazart, Jean-Baptiste Henry, Patrick Quéméré, Charlotte Beylier, Nacima Allouti, Maryline Cordeau, Raphaël Eleouet, Florian Tomaso, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620H (2019) https://doi.org/10.1117/12.2514922
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620I (2019) https://doi.org/10.1117/12.2515186
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620J (2019) https://doi.org/10.1117/12.2515094
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620K (2019) https://doi.org/10.1117/12.2512567
Design Interactions with Metrology: Joint session with conferences 10959 and 10962
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620L (2019) https://doi.org/10.1117/12.2511672
EUV OPC and Modeling: Joint session with conferences 10957 and 10962
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620N (2019) https://doi.org/10.1117/12.2515216
Vitaly Domnenko, Bernd Küchler, Wolfgang Hoppe, Jürgen Preuninger, Ulrich Klostermann, Wolfgang Demmerle, Martin Bohn, Dietmar Krüger, Ryoung Ryoung Han Kim, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620O (2019) https://doi.org/10.1117/12.2515668
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620P (2019) https://doi.org/10.1117/12.2515156
Hotspot Detection
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620Q (2019) https://doi.org/10.1117/12.2515664
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620R (2019) https://doi.org/10.1117/12.2513655
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620S (2019) https://doi.org/10.1117/12.2515172
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620T (2019) https://doi.org/10.1117/12.2515665
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620U (2019) https://doi.org/10.1117/12.2514467
Poster Session
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620V (2019) https://doi.org/10.1117/12.2517051
Tianyang Gai, Ying Chen, Pengzheng Gao, Xiaojing Su, Lisong Dong, Yajuan Su, Yayi Wei, Tianchun Ye
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620X (2019) https://doi.org/10.1117/12.2514177
Dongbing Shao, Jing Sha, Jinning Liu, Robert Wong
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 109620Y (2019) https://doi.org/10.1117/12.2515636
Yang Li, Rick Li, Peng Jiang, Luming Fan, Aman Zheng, Sicong Wang, Guangyi Wang, Zhengfang Liu, Chunshan Du, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096210 (2019) https://doi.org/10.1117/12.2515161
Yang Li, Rick Li, Peng Jiang, Luming Fan, Aman Zheng, Sicong Wang, Guangyi Wang, Chunshan Du, Zhengfang Liu, et al.
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096211 (2019) https://doi.org/10.1117/12.2515167
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096212 (2019) https://doi.org/10.1117/12.2514783
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096213 (2019) https://doi.org/10.1117/12.2514722
Zhenzhen Wan, Limei Liu, Huan Kan, Qijian Wan, Xinyi Hu, Zhengfang Liu, Chunshan Du
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096214 (2019) https://doi.org/10.1117/12.2515137
Xiaolong Ma, Yanxiang Liu, Xinyi Hu, Qijian Wan, Zhengfang Liu, Chunshan Du, Liguo Zhang
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096215 (2019) https://doi.org/10.1117/12.2515135
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096216 (2019) https://doi.org/10.1117/12.2515139
Proceedings Volume Design-Process-Technology Co-optimization for Manufacturability XIII, 1096217 (2019) https://doi.org/10.1117/12.2524569
Back to Top