Experimental investigations of quality trapezoidal shape PMMA microchannel prepared by CO2 laser

Tianhao Wu; Changjun Ke; Yutong Wang

doi:10.1117/12.2504070

15 November 2018 Experimental investigations of quality trapezoidal shape PMMA microchannel prepared by CO₂ laser

Tianhao Wu, Changjun Ke, Yutong Wang

Proceedings Volume 10964, Tenth International Conference on Information Optics and Photonics; 109640B (2018) https://doi.org/10.1117/12.2504070
Event: Tenth International Conference on Information Optics and Photonics (CIOP 2018), 2018, Beijing, China

Abstract

CO₂ lasers often produce PMMA microchannels, as non-metallic materials have a strong absorption capability for mid and far infrared. Triangular cross-section microchannels have been fabricated by conventional methods, due to the Gaussian distribution of laser intensity. It cannot meet the requirements of microfluidic chips sometimes. In this paper, a multi-pass translational method is proposed, which based on the lateral heat-affected zone (HAZ) formed by single ablation, and multiple ablation with its width. This way not only produces a clean bottom like the static multi-pass method, but can modify the cross-sectional topography to produce a clean trapezoidal microchannel. Next, we evaluated the topography of microchannel by introducing the parameter "S", analyzing the variations in surface roughness and HAZ. All these indicate that the multi-pass translational method is a rapid and economic way of fabricating high quality trapezoidal microchannel on PMMA-based microfluidic devices.

Citation Download Citation

Tianhao Wu, Changjun Ke, and Yutong Wang "Experimental investigations of quality trapezoidal shape PMMA microchannel prepared by CO₂ laser", Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109640B (15 November 2018); https://doi.org/10.1117/12.2504070

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