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29 March 2019 Feedforward control with rate-dependent hysteresis compensator for piezoelectric micro stage (Conference Presentation)
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This study developed the feedforward control strategy of the piezoelectric micro-stage integrated with a bridge-type compliant mechanism. The micro-stage was assembled with three actuator legs and a moving plate. The actuator leg was consisted of four piezoelectric actuators with compliant mechanism. However, the complex nonlinear coupling between piezo-actuators and the compliant mechanism caused the hysteresis which can obstruct the precise control. The hysteresis of the piezoelectric micro-stage was realized by the 3rd order polynomial model in this study. Furthermore, the polynomial model was revised to consider the hysteresis change depending on the rate of input voltage. The compensator based on the revised polynomial model was designed for the feedforward control. The performance of the compensator was evaluated while changing the input voltage rate. Experiment results show that the tracking error of the compensator with the rate-dependent model quite decreases in compared with the rate-independent model. The feedforward control based on the revised polynomial model can be successfully utilized to the piezoelectric micro-stage regardless of the input voltage rate.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jongnam Kim, Hyeong Geon Kim , and Il-Kwon Oh "Feedforward control with rate-dependent hysteresis compensator for piezoelectric micro stage (Conference Presentation)", Proc. SPIE 10969, Nano-, Bio-, Info-Tech Sensors and 3D Systems III, 1096915 (29 March 2019);

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