256 x 256 dual-mode CMOS SPAD image sensor

Vinit Dhulla; Sapna S. Mukherjee; Adam O. Lee; Nanditha Dissanayake; Booshik Ryu; Charles Myers

doi:10.1117/12.2523084

13 May 2019 256 x 256 dual-mode CMOS SPAD image sensor

Vinit Dhulla, Sapna S. Mukherjee, Adam O. Lee, Nanditha Dissanayake, Booshik Ryu, Charles Myers

Proceedings Volume 10978, Advanced Photon Counting Techniques XIII; 109780Q (2019) https://doi.org/10.1117/12.2523084
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

Initial results of electrical and optical characterization of Voxtel’s first generation 256 x 256 dual-mode silicon singlephoton avalanche diode (SPAD) image sensor are presented. The SPAD image sensor is a dual-mode device capable of sequential passive single-photon-counting (2D) and active single-photon lidar (3D) range imaging at greater than 250 frames per second, full-frame. The sensor was developed in 180-nm complementary metal-oxide semiconductor imagesensor technology with a pixel pitch of 30 μm and fill factor of 9%; and it achieves room temperature per-pixel dark count rate of less than 55 Hz (0.63 Hz/μm2), peak photon detection probability of 29% (at 480 nm) and timing jitter of 268 ps full width at half maximum at the optimal operating point. Preliminary imaging results in 2D and 3D mode are presented.

Citation Download Citation

Vinit Dhulla, Sapna S. Mukherjee, Adam O. Lee, Nanditha Dissanayake, Booshik Ryu, and Charles Myers "256 x 256 dual-mode CMOS SPAD image sensor", Proc. SPIE 10978, Advanced Photon Counting Techniques XIII, 109780Q (13 May 2019); https://doi.org/10.1117/12.2523084

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