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13 May 2019 256 x 256 dual-mode CMOS SPAD image sensor
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Abstract
Initial results of electrical and optical characterization of Voxtel’s first generation 256 x 256 dual-mode silicon singlephoton avalanche diode (SPAD) image sensor are presented. The SPAD image sensor is a dual-mode device capable of sequential passive single-photon-counting (2D) and active single-photon lidar (3D) range imaging at greater than 250 frames per second, full-frame. The sensor was developed in 180-nm complementary metal-oxide semiconductor imagesensor technology with a pixel pitch of 30 μm and fill factor of 9%; and it achieves room temperature per-pixel dark count rate of less than 55 Hz (0.63 Hz/μm2), peak photon detection probability of 29% (at 480 nm) and timing jitter of 268 ps full width at half maximum at the optimal operating point. Preliminary imaging results in 2D and 3D mode are presented.
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Vinit Dhulla, Sapna S. Mukherjee, Adam O. Lee, Nanditha Dissanayake, Booshik Ryu, and Charles Myers "256 x 256 dual-mode CMOS SPAD image sensor", Proc. SPIE 10978, Advanced Photon Counting Techniques XIII, 109780Q (13 May 2019); https://doi.org/10.1117/12.2523084
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