Three-dimensional shape measurement of specular object with discontinuous surfaces by direct phase measuring deflectometry

Zonghua Zhang; Nan Gao; Xiaohong Liu

doi:10.1117/12.2506786

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13 May 2019 Three-dimensional shape measurement of specular object with discontinuous surfaces by direct phase measuring deflectometry

Zonghua Zhang, Nan Gao, Xiaohong Liu

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Proceedings Volume 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII; 109910A (2019) https://doi.org/10.1117/12.2506786
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, Maryland, United States

Abstract

Phase measuring deflectometry (PMD) has been widely studied to obtain three-dimensional (3D) shape of specular surfaces. Due to the procedure of slope integration, complicated specular components having discontinuous surfaces cannot be measured by the existing PMD methods. This paper presents a novel Direct PMD (DPMD) method to solve this problem of measuring discontinuous specular objects. A mathematical model is established to directly relate the absolute phase and depth data. Then a hardware measuring system has been set up. The system parameters are calibrated by using a plane mirror and a translating stage. 3D shape of an artificial specular step, a monolithic multi-mirror array having multiple specular surfaces and a reflected diamond distribution surface has been measured. The experimental results verified that the proposed method based on DPMD successfully measured full-field 3D shape of specular objects having discontinuous surfaces accurately and effectively.

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Zonghua Zhang, Nan Gao, and Xiaohong Liu "Three-dimensional shape measurement of specular object with discontinuous surfaces by direct phase measuring deflectometry", Proc. SPIE 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII, 109910A (13 May 2019); https://doi.org/10.1117/12.2506786

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