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14 May 2019 GaSb grass as a novel antireflective surface for infrared detectors
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Abstract
GaSb has a high numerical index (approximately 3.90 at a wavelength of 2 μm), leading to reflection of about 35% of incoming photons, depending on wavelength. This results in a significant loss of quantum efficiency for GaSb-based infrared detectors when backside-illuminated, since GaSb is the first material encountered. Here we demonstrate a way of etching broadband antireflective GaSb grass using an inductively coupled Cl2 plasma etch with O2 micromasking, and we examine the possibility for using this material as an antireflective surface for infrared detectors (a patent is pending concerning integration with GaSb-based infrared detectors). We demonstrate sub-10% reflectivity for wavelengths ranging from 200 nm to 12.2 μm and at angles of incidence up to 58°.
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Brian J. Pepper, Karl Y. Yee, Alexander Soibel, Anita M. Fisher, Sam A. Keo, Arezou Khoshakhlagh, and Sarath D. Gunapala "GaSb grass as a novel antireflective surface for infrared detectors", Proc. SPIE 11002, Infrared Technology and Applications XLV, 110020X (14 May 2019); https://doi.org/10.1117/12.2521095
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