Mesa pixel isolation with low dark current for improved MTF performance in SWIR photodiode array applications

Wei Zhang; Michael J. Evans; Wei Huang; Manuel Morales; Devon Wang; William J. Gustus; Doug Malchow; Paul Bereznycky; Michael Caro; Wei Xu; Scott P. Endicter; John Liobe; Sean Houlihan

doi:10.1117/12.2519142

7 May 2019 Mesa pixel isolation with low dark current for improved MTF performance in SWIR photodiode array applications

Wei Zhang, Michael J. Evans, Wei Huang, Manuel Morales, Devon Wang, William J. Gustus, Doug Malchow, Paul Bereznycky, Michael Caro, Wei Xu, Scott P. Endicter, John Liobe, Sean Houlihan

Author Affiliations +

Proceedings Volume 11002, Infrared Technology and Applications XLV; 1100213 (2019) https://doi.org/10.1117/12.2519142
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

Sensors Unlimited Inc. (SUI), a Collins Aerospace company, has developed a short wave infrared (SWIR) photodetector device structure using isolated mesa pixels to improve the detector modulation transfer function (MTF), an important parameter in determining the overall image quality of a camera system. A combination of device fabrication and simulation has been used to evaluate the design and manufacturability of various mesa morphologies. Because mesa formation entails both the removal of some portion of the active region of the photodetector and the introduction of non- planar surfaces, any MTF improvement must be balanced against a loss of quantum efficiency (QE) and potentially higher dark current. Focal plane arrays (FPAs) based on the optimal mesa morphology have been fabricated and compared for MTF and QE performance at the camera level to FPAs built using SUI’s standard pixel structure. The mesa structure described herein is implemented on the front side of the photodetector and could also be implemented across all of SUI’s backside-illuminated (i.e., VIS/SWIR, NIR/SWIR, SWIR) structures for applications where a premium is placed on MTF performance.

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Citation Download Citation

Wei Zhang, Michael J. Evans, Wei Huang, Manuel Morales, Devon Wang, William J. Gustus, Doug Malchow, Paul Bereznycky, Michael Caro, Wei Xu, Scott P. Endicter, John Liobe, and Sean Houlihan "Mesa pixel isolation with low dark current for improved MTF performance in SWIR photodiode array applications", Proc. SPIE 11002, Infrared Technology and Applications XLV, 1100213 (7 May 2019); https://doi.org/10.1117/12.2519142

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