PROCEEDINGS VOLUME 11022
THE INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2018 | 1-5 OCTOBER 2018
International Conference on Micro- and Nano-Electronics 2018
THE INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2018
1-5 October 2018
Zvenigorod, Russian Federation
Front Matter: Volume 11022
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102201 (15 March 2019); doi: 10.1117/12.2528063
Physics of Micro- and Nanodevices
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102202 (15 March 2019); doi: 10.1117/12.2522493
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102203 (15 March 2019); doi: 10.1117/12.2521290
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102204 (15 March 2019); doi: 10.1117/12.2521774
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102205 (15 March 2019); doi: 10.1117/12.2522495
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102206 (15 March 2019); doi: 10.1117/12.2522367
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102207 (15 March 2019); doi: 10.1117/12.2521985
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102208 (15 March 2019); doi: 10.1117/12.2522389
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102209 (15 March 2019); doi: 10.1117/12.2522434
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220A (15 March 2019); doi: 10.1117/12.2521749
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220B (15 March 2019); doi: 10.1117/12.2522526
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220C (15 March 2019); doi: 10.1117/12.2522478
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220D (15 March 2019); doi: 10.1117/12.2520434
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220E (15 March 2019); doi: 10.1117/12.2522322
Device Modeling and Simulation
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220F (15 March 2019); doi: 10.1117/12.2520729
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220G (15 March 2019); doi: 10.1117/12.2522082
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220H (15 March 2019); doi: 10.1117/12.2521880
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220I (15 March 2019); doi: 10.1117/12.2521703
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220J (15 March 2019); doi: 10.1117/12.2521711
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220K (15 March 2019); doi: 10.1117/12.2521890
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220L (15 March 2019); doi: 10.1117/12.2521423
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220M (15 March 2019); doi: 10.1117/12.2521457
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220N (15 March 2019); doi: 10.1117/12.2521838
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220O (15 March 2019); doi: 10.1117/12.2522483
MEMS Devices and Sensors
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220P (15 March 2019); doi: 10.1117/12.2520838
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Q (15 March 2019); doi: 10.1117/12.2521420
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220R (15 March 2019); doi: 10.1117/12.2522515
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220S (15 March 2019); doi: 10.1117/12.2521783
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220T (15 March 2019); doi: 10.1117/12.2521986
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220U (15 March 2019); doi: 10.1117/12.2520519
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220V (15 March 2019); doi: 10.1117/12.2521034
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220W (15 March 2019); doi: 10.1117/12.2521123
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220X (15 March 2019); doi: 10.1117/12.2522440
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Y (15 March 2019); doi: 10.1117/12.2521796
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220Z (15 March 2019); doi: 10.1117/12.2522461
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102210 (15 March 2019); doi: 10.1117/12.2522033
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102211 (15 March 2019); doi: 10.1117/12.2521976
Micro- and Nanoelectric Materials and Films
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102212 (15 March 2019); doi: 10.1117/12.2521759
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102213 (15 March 2019); doi: 10.1117/12.2522161
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102214 (15 March 2019); doi: 10.1117/12.2521696
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102215 (15 March 2019); doi: 10.1117/12.2521817
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102216 (15 March 2019); doi: 10.1117/12.2521814
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102217 (15 March 2019); doi: 10.1117/12.2522121
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102218 (15 March 2019); doi: 10.1117/12.2521784
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102219 (15 March 2019); doi: 10.1117/12.2521959
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221A (15 March 2019); doi: 10.1117/12.2521802
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221B (15 March 2019); doi: 10.1117/12.2520548
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221C (15 March 2019); doi: 10.1117/12.2521808
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221D (15 March 2019); doi: 10.1117/12.2521973
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221E (15 March 2019); doi: 10.1117/12.2522316
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221F (15 March 2019); doi: 10.1117/12.2512203
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221G (15 March 2019); doi: 10.1117/12.2521498
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221H (15 March 2019); doi: 10.1117/12.2521720
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221I (15 March 2019); doi: 10.1117/12.2522103
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221J (15 March 2019); doi: 10.1117/12.2521961
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221K (15 March 2019); doi: 10.1117/12.2520304
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221L (15 March 2019); doi: 10.1117/12.2521401
Micro- and Nanoelectronic Technologies I
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221M (15 March 2019); doi: 10.1117/12.2522105
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221N (15 March 2019); doi: 10.1117/12.2522482
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221O (15 March 2019); doi: 10.1117/12.2522458
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221P (15 March 2019); doi: 10.1117/12.2522487
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221Q (15 March 2019); doi: 10.1117/12.2522109
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221R (15 March 2019); doi: 10.1117/12.2522332
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221S (15 March 2019); doi: 10.1117/12.2520521
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221T (15 March 2019); doi: 10.1117/12.2521443
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221U (15 March 2019); doi: 10.1117/12.2521891
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221V (15 March 2019); doi: 10.1117/12.2521465
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221W (15 March 2019); doi: 10.1117/12.2521797
Micro- and Nanoelectronic Technologies II
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221X (15 March 2019); doi: 10.1117/12.2522505
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221Y (15 March 2019); doi: 10.1117/12.2522414
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221Z (15 March 2019); doi: 10.1117/12.2521969
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102220 (15 March 2019); doi: 10.1117/12.2522337
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102221 (15 March 2019); doi: 10.1117/12.2521275
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102222 (15 March 2019); doi: 10.1117/12.2522457
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102223 (15 March 2019); doi: 10.1117/12.2521617
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102224 (15 March 2019); doi: 10.1117/12.2522049
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102225 (15 March 2019); doi: 10.1117/12.2522472
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102226 (15 March 2019); doi: 10.1117/12.2522473
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102227 (15 March 2019); doi: 10.1117/12.2522166
Quantum Informatics I
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102228 (15 March 2019); doi: 10.1117/12.2522448
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102229 (15 March 2019); doi: 10.1117/12.2522433
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222A (15 March 2019); doi: 10.1117/12.2522445
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222B (15 March 2019); doi: 10.1117/12.2522447
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222C (15 March 2019); doi: 10.1117/12.2521763
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222D (15 March 2019); doi: 10.1117/12.2523571
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222E (15 March 2019); doi: 10.1117/12.2520280
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222F (15 March 2019); doi: 10.1117/12.2520034
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222G (15 March 2019); doi: 10.1117/12.2521624
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222H (15 March 2019); doi: 10.1117/12.2522432
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222I (15 March 2019); doi: 10.1117/12.2521281
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222J (15 March 2019); doi: 10.1117/12.2521982
Quantum Informatics II
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222K (15 March 2019); doi: 10.1117/12.2522080
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222L (15 March 2019); doi: 10.1117/12.2521910
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222M (15 March 2019); doi: 10.1117/12.2522430
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222N (15 March 2019); doi: 10.1117/12.2522413
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222O (15 March 2019); doi: 10.1117/12.2522078
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222P (15 March 2019); doi: 10.1117/12.2522383
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222Q (15 March 2019); doi: 10.1117/12.2522426
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222R (15 March 2019); doi: 10.1117/12.2522053
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222S (15 March 2019); doi: 10.1117/12.2522427
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222T (15 March 2019); doi: 10.1117/12.2522462
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222U (15 March 2019); doi: 10.1117/12.2522474
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222V (15 March 2019); doi: 10.1117/12.2521253
Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110222W (15 March 2019); doi: 10.1117/12.2522431
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