Mask formation on GaAs substrate by focused ion beams of Ga+ for plasma chemical etching

Viktor S. Klimin; Ivan N. Kots; Victoria V. Polyakova; Alexey A. Rezvan; Oleg A. Ageev

doi:10.1117/12.2522332

15 March 2019 Mask formation on GaAs substrate by focused ion beams of Ga+ for plasma chemical etching

Viktor S. Klimin, Ivan N. Kots, Victoria V. Polyakova, Alexey A. Rezvan, Oleg A. Ageev

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110221R (2019) https://doi.org/10.1117/12.2522332
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

This paper presents а masking layer formation using the focused ion beams method on the substrate surface of its own undoped gallium arsenide for subsequent plasma chemical etching. Focused ion beam was processed to create a mask for ion-induced plasma-chemical processing. The main parameters affecting the formation of nanoscale structures such as the accelerating voltage of a focused ion beam and the etching time in the plasma are investigated. With an increase in the etching time, the depth of the structures obtained decreased from 68 to 2.5 nm. The possibility of using this method for the formation of nanoscale structures without using liquid lithography is shown.

Citation Download Citation

Viktor S. Klimin, Ivan N. Kots, Victoria V. Polyakova, Alexey A. Rezvan, and Oleg A. Ageev "Mask formation on GaAs substrate by focused ion beams of Ga+ for plasma chemical etching", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221R (15 March 2019); https://doi.org/10.1117/12.2522332

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available